EUV Sources – IEEE Nano Council
November 15, 2011, Nanotechnology Council Symposium, Santa Clara, CA–Hakaru Mizoguchi from Gigaphoton talked about efforts to produce a manufacturing-grade EUV source. This photon source will be needed for the next-generation processes below 20 nm. Some of the shortcomings for EUV sources are low power and short lifetimes. To date, the industry has promised production-quality sources…